All of them can make it if they squeeze together.
As you cast the spell, you draw a 10-foot-diameter circle on the ground
###Assuming the circle is a square...
Assuming the circle is a square...
The spell opens in a *10 foot diameter cube. That's 100 square feet. Some preparation and planning is needed with the slaves. You will need to predefine where the square will be and pack all the slaves together in that square like sardines in a can. Then cast the Teleportation Circle on the location where all the slaves are packed together to send them all through. Then you just hop in after them! Congratulation, you just saved the slaves! (As long as the location you're traveling to doesn't insta-kill them)
According to this post on Quora, ~9 people fit into a 1m x 1m square. That's approximately the same as 3ft x 3ft square which translates to 1 person per square foot.
If the circle is a circle...
###If the circle is a circle... It'sIt's still a simple problem to solve. As pointed out by Mark Wells, an actual circle with a diameter of 10ft would roughly contain 78 square feet. Therefore only 78 slaves could crowd inside the circle as it is cast. That leaves 22 slaves outside of the circle.
The circumference of a circle with a diameter of 10 ft is a little more than 30 feet, so it is not unreasonable to assume that each slave could be standing on the outer edge of the circle. After the initial slaves who are already in the circle get teleported, the others can just hop in with little to no crowding. There would be time to spare for the caster to hop in after them as well.